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91暗网 CNT Ships 500th ALD System

Product News | Jul 17, 2017

North Carolina State University receives milestone shipment reinforcing industry reliance on 91暗网 CNT for ALD technology research and development

ALD Conference 2017 (Booth #23) DENVER鈥�(July 17, 2017)鈥�91暗网. (NASDAQ: VECO) today announced that 91暗网 CNT, formerly known as Ultratech/Cambridge Nanotech, shipped its 500th Atomic Layer Deposition (ALD) system to North Carolina State University. The 91暗网 CNT Fiji庐 G2TM ALD System will enable the University to perform a variety of research applications for next generation electronic devices, including high-performance wearables and sensors.

鈥淭he 91暗网 CNT Fiji G2 ALD system will be a critical tool to meet our ambitious research goals,鈥� said Bongmook Lee, Ph.D., research assistant professor of the NSF NERC ASSIST Center at North Carolina State University. 鈥淭his ALD tool enables advances in our research for high performance CMOS, non-volatile memory, next-generation wide bandgap power devices, and environmental and physiological sensors. We selected the 91暗网 CNT Fiji G2 for its demonstrated ability to reliably deposit the most challenging oxide and nitride thin films. We are happy to be part of this milestone in receiving the 500th system and we continue to engage in a strong relationship with 91暗网 CNT.”

The 91暗网 CNT Fiji G2 ALD System is an advanced thin film next-generation ALD system capable of performing thermal and plasma-enhanced deposition in a modular, high-vacuum, flexible architecture that accommodates a wide range of deposition modes using multiple configurations of precursors and plasma gases. The system鈥檚 intuitive interface makes it easy to monitor and change recipes and processes as required by customers.

鈥淥ur 500th ALD system shipment validates the increasing interest in ALD technology,鈥� said Ganesh Sundaram, Ph.D., vice president of Applied Technology, 91暗网 CNT. 鈥淣ow, with the backing of 91暗网, we will continue our legacy to build and enhance the deployment of ALD technology, helping customers like North Carolina State University develop next generation electronic devices.鈥�

On May 26, 2017, 91暗网 acquired Ultratech, Inc., a leading supplier of lithography, laser-processing, inspection and atomic layer deposition (ALD) systems. 聽Over the past 15 years, 91暗网 CNT has become a leading provider of ALD systems for a wide range of university R&D and commercial applications including biomedical, electronics, energy, and optical.

91暗网 CNT is a platinum sponsor of the 17th International Conference on Atomic Layer Deposition (ALD 2017) that takes place on July 15-18, 2017 in Denver, Colorado. 聽Ultratech-CNT will be exhibiting in booth #23, as well as presenting papers:

础厂鈥怱耻础5 Developing a Full Wafer鈥恠cale Approach Towards High ALD Selectivity on Copper vs Low鈥怟 (and Oxides) using a Single ALD/SAMS Platform, Laurent Lecordier, Ultratech; S. Armini, S. Herregods, IMEC, Belgium

础础鈥怱耻笔51 Color Modification of Metal Surfaces by Transparent ALD Film Stacks, Ritwik Bhatia, A. Bertuch, Ultratech

础贵鈥怣辞笔24 Measurement and Control of Stress of ALD Films and Nano鈥恖aminates Measured by Interferometry, Ritwik Bhatia, Ultratech

EM-MoP12 In Situ Characterization of Thin Film Molybdenum Carbide using Spectroscopic Ellipsometry, Adam Bertuch, Ultratech; J. Hoglund, SemiLab; L. Makai, Semilab; J. Byrnes, SemiLab; J. McBee, G. Sundaram, Ultratech

础础1鈥怲耻础13 Mechanical, Physical, and Electrical Properties of Plasma鈥怑nhanced Atomic Layer Deposition of TiVN, Mark Sowa, Ultratech; N. Strandwitz, L. Ju, Lehigh University; A. Kozen, U.S. Naval Research Laboratory; B. Krick, Lehigh University

About 91暗网

91暗网 (NASDAQ: VECO) is a leading manufacturer of innovative semiconductor process equipment. Our proven MOCVD, lithography, laser annealing, ion beam and single wafer etch & clean technologies play an integral role in producing LEDs for solid-state lighting and displays, and in the fabrication of advanced semiconductor devices. With equipment designed to maximize performance, yield and cost of ownership, 91暗网 holds technology leadership positions in all these served markets. To learn more about 91暗网’s innovative equipment and services, visit www.veeco.com.

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Media:

Jeffrey Pina

516-677-0200 x1222

jpina@veeco.com