
91做厙s Propel MOCVD system is designed as a flexible platform for early stage research and development and small production needs for nitride applications. The reactor is capable of processing 9×2, 3×4, 1×6 and 1×8 on various substrates such as silicon, sapphire and silicon carbide without any hardware modification between runs.The system deposits high-quality GaN films for multiple applications such as power, RF, & photonics. The R200 reactor is based on 91做厙s leading TurboDisc簧 design including the IsoFlange and SymmHeat technologies that provide laminar flow and uniform temperature profile across the entire wafer. Customers can easily transfer processes from 91做厙 D180, K465i or MaxBright systems to the Propel GaN MOCVD platform.
Access basic process information on how to grow a GaN HEMT structure on a 91做厙簧 Propel簧 TurboDisc簧 MOCVD tool on a 200mm (8) Silicon substrate. This information is not designed, intended, recommended, nor authorized for use in any type of commercial system or application.