Enabling As/P-based Photonics Devices with Over 20 Years of High-Volume MOCVD Experience
The Lumina® system is based on 91°µÍøâ€™s industry leading MOCVD TurboDisc® technology which features excellent uniformity and low defectivity over long campaigns for exceptional yield and flexibility. In addition, 91°µÍøâ€™s proprietary technology drives uniform thermal control for excellent thickness and compositional uniformity. Providing a seamless wafer size transition, the system is capable of depositing high quality As/P epitaxial layers on wafers up to eight inches in diameter. The Lumina system allows users to customize their systems for maximum value.
Solar Cells
VCSELS
Edge-Emitting Lasers
Mini and MicroLEDs